The femtosecond laser micromachining system used in the experiment is shown in the figure. It is mainly composed of laser, light guide module, galvanometer system, three-dimensional mobile platform, CCD system and computer control system. The laser has a wavelength of 1030 nm, a pulse width of 800 ns and a maximum pulse energy of 50 μ J.
The experimental specimen is the semi-finished tooth blank ofafter high-speed milling, which is cut into gear sheet by EDM numerical control wire cutting machine, and then the surface of single tooth slice is polished and polished with sandpaper. After cleaning, the experimental tooth blank is obtained, and the sliced tooth surface is irradiated vertically by femtosecond laser.